Electron Beam Lithography Systems
Since 1975 STS-Elionix has made significant contributions to the field of fabrication measurement, and analysis. Elionix has installed over 400 electron beam lithography systems (EBL) world-wide.
TS-Elionix is a partnership that delivers state-of-the-art nanotechnology products throughout North America and Europe. The Elionix electron beam lithography (EBL) systems are built to meet customer demands for finer lines and writing speeds. This customer centric approach resulted in the world’s first 150kV EBL system for research as well as the world’s first 400MHz beam deflection system on production EBL tools.